Description
Silicon Targets
Silicon is an important sputtering target material, primarily used in reactive magnetron sputtering to deposit dielectric layers such as SiO2 and SiN. As a crucial functional thin film material, silicon exhibits excellent hardness, optical properties, dielectric characteristics, wear resistance, and corrosion resistance. These properties make it widely applicable in fields such as optics and microelectronics, with significant potential for future development. Silicon is currently of great interest as a functional material internationally and is primarily used in LCD transparent conductive glass, architectural LOW-E glass, and the microelectronics industry.
Silicon targets can generally be divided into single crystal and polycrystalline types.
Our company uses the Czochralski crystal growth technique to manufacture single-crystal and polycrystalline targets, ensuring uniform grain size. The diameter can reach 11 inches, and we can process targets into various shapes such as rectangular, circular, and more. Custom dimensions based on customer drawings are also available.
Material Properties:
- Density: 2.33 g/cm³
- Melting Point: 1420°C
- Thermal Conductivity: 163.3 W/m·K at 273 K
- Thermal Expansion: 4.15 × 10⁻⁶ / °C
- Hardness: Knoop 1150
- Specific Heat Capacity: 703 J/kg·K
- Dielectric Constant: 13 at 10 GHz
- Young’s Modulus (E): 131 GPa
- Shear Modulus (G): 79.9 GPa
- Bulk Modulus (K): 102 GPa
- Elastic Coefficients:
- C₁₁ = 167
- C₁₂ = 65
- C₄₄ = 80
- Poisson Ratio: 0.266
- Solubility: Insoluble in water
- Molecular Weight: 28.09
- Class/Structure: Cubic diamond, Fd3m
Rotating Silicon Target
Applications:
Silicon targets are widely used for device coating in fields such as optics, optoelectronics, semiconductors, touch screens, and more.
Parameters:
- Element Symbol: Si
- Purity: 4N+
- Shape: Flat Target; Rotating Target
- Appearance: Dark gray, semi-metallic
- Typical Density: 2.32 g/cm³
- Standard Dimensions:
- Flat Target: 500 x 500 x 30 mm
- Rotating Target: Length 4000 mm
- Custom Sizes Available
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